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SILICON MICROSTRUCTURES INCORPORATED
*
SM5651/SM5652
Low Pressure, Constant Current DIP Low Pressure, Constant Voltage DIP
LOW PRESSURE TRANSDUCER FULLY TEMPERATURE COMPENSATED AND CALIBRATED DUAL-IN-LINE PACKAGE
DESCRIPTION
The SM5650 Series of OEM pressure sensors are fully calibrated, temperature compensated low-pressure sensors in dual in-line packages for printed circuit board mounting. These sensors offer improved performance as well as the option for either constant current or constant voltage excitation. Higher pressure ranges are also available (See SM5611/SM5612 Datasheet), resulting in the broadest selection of standard pressure ranges in the industry. The SM5600 Series pressure sensors are constructed by attaching a highly stable piezoresistive pressure sensor chip to a ceramic substrate. Thick film resistors on the ceramic are laser trimmed during manufacturing to provide zero offset calibration, temperature compensation for zero offset, and temperature compensation for sensitivity. In the Model SM5651, an additional resistor is trimmed to normalize the output of an external differential amplifier to provide span calibration when the sensor is driven by a constant current supply. In the Model SM5652, a constant voltage supply can be used and the normalized output span of each sensor can then be easily amplified. The model SM5651 is designed for constant current excitation. The model SM5652 is designed for constant voltage excitation. Various electrical pin and pressure port configurations are available for flexibility in matching this product to specific applications.
FEATURES
* * * * * * * * Low pressure (from 0-0.15 PSI FS to 03.0 PSI FS) Constant voltage and constant current versions Easy to use dual in-line package (DIP) Wide 0-60C compensated temperature range Span calibration to 2% for low pressure Zero offset calibration High performance, stable packaged silicon chip Gage and differential pressure configurations
APPLICATIONS
* * * * * * Medical equipment Respiration HVAC Level detection Flow measurement Industrial control
Rev 1.2 8_02 2001-2002 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 Sales@Si-Micro.Com WWW.Si-Micro.Com
SM5651/SM5652
CHARACTERISTICS FOR SM5651/SM5652 - SPECIFICATIONS
Min.
Excitation Current (SM5651) Voltage (SM5652) Output Span (SM5651) Span (SM5652) Offset Temperature Performance TC Span TC Offset Temp Hysteresis Accuracy Linearity Repeatability Pressure Hysteresis Sensitivity Matching Impedance (SM5651) Z Input Z Output Impedance (SM5652) Z Input Z Output Temperature Range Calibration Operating Storage Dynamic Characteristics Proof Pressure Burst Pressure
Notes:
1. 2. 3. 4. 5. 6. Positive Pressure is defined as entry on the bottom side of the die; gain, during factory calibration, is set using negative pressure For the SM5652, 0.15 PSI range, span is 23.75 (min) to 26.25 (max). Measured over a temperature range of 0 to 60 oC. For 0.15 PSI, TC Span=2.0%FS; TC Offset=2.0%FS; For 0.3 PSI, TC Span==0.75%FS For 0.30 PSI, Hysteresis=0.45%FS; For 0.15 PSI, Hysteresis=0.65%FS Best fit straight line; measured from top-side of die For 0.30 PSI, Linearity=0.5%FS; ORDERING INFORMATION: For 0.15 PSI, Linearity=2.5%FS Sensitivity matching relates to part-to-part matching For 0.15 PSI, Sensitivity Matching=5.0%FS Model 5652 Pin-Out 1 -Signal Out 2 -Vexc 3 +Signal Out* 4 +Vexc 5 Do Not Connect 6 Do Not Connect
Test Conditions: Model SM5651 w/excitation = 1.500mA @ 25 oC, Model SM5562 w/excitation = 10.00Vdc @ 25 oC, unless otherwise specified.
Typ.
1.50 10.00 45.0 25.0 +0.20 +0.20 +0.20 +0.05 +0.05 +0.05 +0.05 -0.20 3.00 3.30 8.00 2.50
Max.
3.00 20.00 75.0 25.5 2.00 0.65 1.00 0.30 0.30 0.30 0.30 +2.00 3.80 3.80 25.00 3.80 60 125 125
Units
mA V mV mV mV %FS %FS %FS %FS %FS %FS %FS k k k k C C C FS Pressure FS Pressure
Notes
0.00 0.00 25.0 24.5 -2.00 -0.65 -1.00 -0.30 -0.30 -0.30 -0.30 -2.00 1.80 2.70 4.50 2.00 0 -40 -55 10X 15X
1 1, 2
3 3 4 5
1, 6
Model 5651 Pin-out 1 -Signal Out 2 -Iexc 3 +Signal Out* 4 +Iexc 5 Gainset Resistor 6 Gainset Resistor
Circuit Configuration for SM5651
Notes: - All dimensions are shown in inches - Tolerance on all dimensions + 0.005" unless otherwise specified.
*Output increases as pressure is increased on Positive Differential Tube or Absolute Tube DO NOT connect to "Do Not Connect" pins
Pressure Ranges PSI 5651/ 5652 0.15 001 0.30 003 0.80 008 1.50 015 3.00 030
Pin Configuration
Notice: Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this publication has been checked, no responsibility, however, is assumed for inaccuracies. Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
Rev 1.2 8_02
2001-2002 Silicon Microstructures, Inc. 1701 McCarthy Blvd. Milpitas, CA 95035 USA Tel: 408-577-0100 Fax: 408-577-0123 Sales@Si-Micro.Com WWW.Si-Micro.Com

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